发明名称 Replacement gate fabrication methods
摘要 Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
申请公布号 US8575013(B2) 申请公布日期 2013.11.05
申请号 US201113281236 申请日期 2011.10.25
申请人 BAARS PETER;GOLDBACH MATTHIAS;GLOBALFOUNDRIES, INC. 发明人 BAARS PETER;GOLDBACH MATTHIAS
分类号 H01L21/3205 主分类号 H01L21/3205
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