发明名称 |
Capacitive humidity sensor and manufacturing method |
摘要 |
A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.
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申请公布号 |
US8573052(B2) |
申请公布日期 |
2013.11.05 |
申请号 |
US200913128934 |
申请日期 |
2009.11.12 |
申请人 |
HONG SUNG MIN;KIM KUN NYUN;JO YOUNG CHANG;KIM WON HYO;KOREA ELECTRONICS TECHNOLOGY INSTITUTE |
发明人 |
HONG SUNG MIN;KIM KUN NYUN;JO YOUNG CHANG;KIM WON HYO |
分类号 |
G01N19/00 |
主分类号 |
G01N19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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