发明名称 Non-planar quantum well device having interfacial layer and method of forming same
摘要 Techniques are disclosed for forming a non-planar quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), and a quantum well layer. A fin structure is formed in the quantum well structure, and an interfacial layer provided over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
申请公布号 US8575653(B2) 申请公布日期 2013.11.05
申请号 US20100924307 申请日期 2010.09.24
申请人 RACHMADY WILLY;PILLARISETTY RAVI;LE VAN H.;CHAU ROBERT;INTEL CORPORATION 发明人 RACHMADY WILLY;PILLARISETTY RAVI;LE VAN H.;CHAU ROBERT
分类号 H01L29/66 主分类号 H01L29/66
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