发明名称 |
Substrate transport apparatus |
摘要 |
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
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申请公布号 |
US8573919(B2) |
申请公布日期 |
2013.11.05 |
申请号 |
US20050178830 |
申请日期 |
2005.07.11 |
申请人 |
GILCHRIST ULYSSES;HOFMEISTER CHRISTOPHER;BROOKS AUTOMATION, INC. |
发明人 |
GILCHRIST ULYSSES;HOFMEISTER CHRISTOPHER |
分类号 |
B25J9/02;B25J9/04;B25J9/08;B25J9/10;B25J9/12;H01L21/677 |
主分类号 |
B25J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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