发明名称 |
System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror |
摘要 |
A system and method for an extreme ultraviolet light chamber comprising a collector mirror, a cooling system coupled to a backside of the collector mirror operative to cool a reflective surface of the collector mirror and a buffer gas source coupled to the extreme ultraviolet light chamber.
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申请公布号 |
US8575575(B2) |
申请公布日期 |
2013.11.05 |
申请号 |
US20100725167 |
申请日期 |
2010.03.16 |
申请人 |
PARTLO WILLIAM N.;FOMENKOV IGOR V. |
发明人 |
PARTLO WILLIAM N.;FOMENKOV IGOR V. |
分类号 |
H01G2/00;G03F7/20;H05G2/00 |
主分类号 |
H01G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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