发明名称 FABRICATING METHOD OF THE SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device with an improved dark characteristic is disclosed. The method for fabricating the semiconductor device includes forming a multilayered metal line on one surface of a substrate, removing a part of the other surface of the substrate, reducing the thickness of the substrate, forming an oxide layer on the other surface of the substrate by a low temperature oxidation, and removing the oxide layer.
申请公布号 KR20130120199(A) 申请公布日期 2013.11.04
申请号 KR20120043276 申请日期 2012.04.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, YUN KI
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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