| 摘要 |
PURPOSE: An apparatus and a method for monitoring a valve in vacuum equipment are provided to easily perform a monitoring process by using a main controller for adjusting all valves. CONSTITUTION: A slit valve(20) opens and closes a slit. An angle valve delivers and blocks a suction force of a vacuum pump to and from a chamber. A counter(30) counts the number of operations of the slit valve or the angle valve. A main controller(40) notifies the replacement time of the valves. An alarm part alerts the replacement time of the valves to the outside. |
