发明名称 Adsorption cover for vacuum-chuck
摘要 PURPOSE: An adsorption cover for a vacuum chuck is provided to easily adhere a workpiece to a central part and to perform penetration work forming a hole to the workpiece. CONSTITUTION: An adsorption cover for a vacuum chuck comprises a main body(110), a support protrusion, a vacuum groove, a vacuum adsorption groove, a vacuum passage, a plurality of screw insertion holes, a screw coupling hole, a plurality of fixing screws(120), a plurality of opening and closing screws, and O-rings(140). The screw coupling hole is individually formed to the vacuum adsorption groove where the screw insertion hole(15) is not formed. The fixing screws are individually inserted to the screw insertion hole and are coupled with a female screw(16) of the vacuum chuck(10). The opening and closing screws are individually coupled with the screw coupling hole. The O-rings are individually inserted to the fixing screw and the opening and closing screw.
申请公布号 KR101323453(B1) 申请公布日期 2013.11.04
申请号 KR20110111216 申请日期 2011.10.28
申请人 发明人
分类号 B23Q3/02;B23Q3/08;H01L21/683 主分类号 B23Q3/02
代理机构 代理人
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