SEED ETCHANT COMPRISING METAL HALOGEN COMPOUNDS

摘要

The present invention relates to a composite of an etching agent which selectively etches a seed layer consisting of nickel, chrome or nickel-chrome alloy. For further information, the composite comprises first liquid consisting of hydrochloric acid and metal-halogen compounds, nickel made by the mixture of nitrogenous compounds and second liquid with salt, and the nickel-chrome alloy. The invention is provided to maintain the service life and property of the etching agent. [Reference numerals] (AA) Etching bath (etchant);(BB) Analysis device;(CC) Controller;(DD) Fixed quantity pump;(EE) First solution;(FF) Second solution;(GG) Supplying device