发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN COMPOSITION FILM, AND SEMICONDUCTOR DEVICE USING THE PHOTOSENSITIVE RESIN COMPOSITION OR THE PHOTOSENSITIVE RESIN COMPOSITION FILM
摘要 <p>Disclosed are a photosensitive resin composition and a photosensitive resin composition film, each of which has small stress after curing and exhibits excellent adhesion after thermal compression bonding. Specifically disclosed is a photosensitive resin composition which is characterized by containing: (a) an alkali-soluble polyimide which has a structural unit represented by general formula (1), while having a structure represented by general formula (2) and/or (3) at at least one end of the main chain; (b) a compound which has two or more epoxy groups and/or oxetanyl groups in each molecule; and (c) a quinonediazide compound. The photosensitive resin composition is also characterized in that: less than 10 parts by weight of an acrylic resin is contained per 100 parts by weight of the polyimide (a); and the content of the compound (b) is not less than 20 parts by weight per 100 parts by weight of the polyimide (a).</p>
申请公布号 KR20130119993(A) 申请公布日期 2013.11.01
申请号 KR20137027060 申请日期 2011.06.10
申请人 TORAY INDUSTRIES, INC. 发明人 NIWA HIROYUKI
分类号 G03F7/023;C09J7/02;G03F7/004;H01L21/027 主分类号 G03F7/023
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