| 摘要 |
PURPOSE: A transparent composite conductive oxide film has a simple manufacturing process, has excellent optical and electric performance, and has excellent luminous efficiency as a transparent conductive film. CONSTITUTION: A CuOx:AZO transparent composite conductive oxide film is manufactured by a sol-gel chemical method. A copper oxide is formed of zinc oxide (AZO) doped with aluminum. The mole ratio of the CuO is 0.5-2.0 mol%. The doping concentration of Al to ZnO in the AZO is 0.05-5 atom%. The optical transmittancy of the oxide film at 380-800 nm is 80-90%. The electric resistance of the oxide film is 6.94×10^(-3) - 1.66×10^(-2)Ωm. |
