发明名称 METHOD AND SYSTEM FOR DOUBLE-SIDED PATTERNING OF SUBSTRATES
摘要 The present invention is directed towards a method and a system of patterning first and second opposed sides of a substrate. The method and system may employ a mold assembly and obtaining a desired spatial relationship between the first and second opposed sides of the substrate and the mold assembly. In a further embodiment, the method and system may employ a first and a second mold assembly.
申请公布号 KR101324549(B1) 申请公布日期 2013.11.01
申请号 KR20087015448 申请日期 2006.11.30
申请人 发明人
分类号 H01L51/50 主分类号 H01L51/50
代理机构 代理人
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