LASER CRYSTALLIZATION APPARATUS AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE USING THE SAME

摘要

An embodiment of the present invention relates to a laser crystallization device. The laser crystallization device according to the embodiment of the present invention comprises a substrate to be processed; a laser generation part generating a laser; and a stitch blade cutting the laser toward the substrate in both directions at a specific width by being arranged on the substrate. Both end parts of the laser emitted to the substrate is diffracted by being cut by the stitch blade.