| 摘要 |
The present invention, in order to provide a high-performance and high-efficiency ion beam processing device, modifies the structure of a saddle field ion source, extends the opening of a cathode from which ion beams are to be extracted among two symmetric cathodes arranged on each side of an anode in order to make the two cathodes asymmetric and thus to make the cathode for extraction emit more of the generated ion beams than the other. The shape of the cathode which has the extended opening is modified to a conical shape. Further, the previous operation method which grounds both cathodes is changed to a structure in which the cathode for ion beam extraction is floating, not grounded, to make the extracted ion beams converge to a focal point and then diverge, and multiple ion sources are arranged in a radial shape to measure the relative arrangement angle θ, the distance to the stage where a sample is placed, and/or the ion current of the other cathode, thereby controlling the ion current of the extraction cathode and thus achieving the desired ion beam intensity and ion beam cross-sectional area. |
