CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the usability of a charged particle beam device for observing a sample exposed in atmospheric pressure.SOLUTION: A charged particle beam deice 1 includes: a charged particle optical body tube 10 for housing a charged particle source 11 and an electron lens 13; a support housing 20 mounted with the charged particle optical body tube 10 on the top surface and having an opening part on the side surface; an inner housing 30 having an opening part on the side surface and inserted into the support housing 20 such that the opening part is located at the same side surface as the opening part of the support housing 20 to close the opening part of the support housing 20; a first aperture member 15 provided in the vicinity of the center of a magnetic field of an objective lens in the electron lens 13 and has a small hole at the central part; a second aperture member 31 provided so as to close an opening part provided on the top surface of the inner housing 30 from an outside and has a small hole in the central part; and a detector 16 for detecting a discharged secondary charged particle when a primary charged particle beam is applied to a sample 60 arranged on a lower surface of the second aperture member 31.