发明名称 ROLL-TO-ROLL DIGITAL PHOTOLITHOGRAPHY
摘要 A system for making flexible circuit films includes an inelastic conveyor, a web handling apparatus configured to pass a flexible substrate around the inelastic conveyor, an image acquisition apparatus configured to measure positions of a first set of alignment marks on the flexible substrate at a first conveyor location, an exposure apparatus configured to patternwise expose a photosensitive material on the flexible substrate at a second conveyor location, and an image processor configured to receive the measured positions of the first set of alignment marks, and to compare the measured positions with reference positions of the first set of alignment marks. The exposure apparatus is configured to patternwise expose the photosensitive material based on the comparison between the measured positions and the reference positions.
申请公布号 US2013286367(A1) 申请公布日期 2013.10.31
申请号 US201313929505 申请日期 2013.06.27
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 HAASE MICHAEL A.;TOKIE JEFFREY H.;THEIS DANIEL J.;NELSON BRIAN K.
分类号 G03F7/20 主分类号 G03F7/20
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