发明名称 CONTACT AND INTERCONNECT METALLIZATION FOR SOLAR CELLS
摘要 A fabrication line includes a texturizing module configured to texture a substrate, an emitter module configured to form an emitter region, a passivation layer module configured to form a passivation layer, a barrier contact module configured to form a barrier contact region, a firing module configured to anneal the barrier contact region, a top metal contact module configured to form a top metal contact region, and a soldering module configured to solder the barrier contact region to the top metal contact region. The modules are integrated by one or more automated substrate handlers into a single fabrication line. A method for fabricating a solar cell includes sequentially, in an automated fabrication line: doping a dopant in a substrate; disposing a passivation layer; disposing and annealing a barrier metal paste to form a barrier contact; and disposing and annealing a metal contact paste to form a top metal contact region.
申请公布号 US2013288424(A1) 申请公布日期 2013.10.31
申请号 US201313791067 申请日期 2013.03.08
申请人 APPLIED MATERIALS, INC. 发明人 PARIKH SUKETU ARUN;SHU JEN;GEE JAMES M.
分类号 H01L31/18 主分类号 H01L31/18
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