发明名称 |
METHOD FOR PRODUCING MOLD FOR TRANSFERRING FINE PATTERN, METHOD FOR PRODUCING SUBSTRATE HAVING UNEVEN STRUCTURE USING SAME, AND METHOD FOR PRODUCING ORGANIC EL ELEMENT HAVING SAID SUBSTRATE HAVING UNEVEN STRUCTURE |
摘要 |
Provided, by a simple process and with high throughput, is a mold for transferring a fine pattern, suitable for producing a substrate having an uneven structure such as a diffraction grating. A method for producing a mold for transferring a fine pattern, comprising a step for coating the surface of a base material with a solution comprising a block copolymer and a polyalkylene oxide, a solvent phase separation step for phase-separating the block copolymer in the presence of an organic solvent vapor to obtain a block copolymer film which has an uneven structure on the surface and the interior of which is a horizontal cylinder structure, a step for layering a metal layer by electroforming, and a step for peeling off the base material having the uneven structure from the metal layer. |
申请公布号 |
WO2013161454(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
WO2013JP57851 |
申请日期 |
2013.03.19 |
申请人 |
JX NIPPON OIL & ENERGY CORPORATION |
发明人 |
SEKI, TAKASHI;MASUYAMA, SATOSHI;FUKUDA, MAKI;NISHIMURA, SUZUSHI |
分类号 |
B29C59/02;B29C33/38;H01L21/027;H01L51/50;H05B33/02;H05B33/10 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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