发明名称 MATERIAL TEST STRUCTURE
摘要 Material test structures having cantilever portions and methods of forming the same are described herein. As an example, a method of forming a material test structure includes forming a number of electrode portions in a first dielectric material, forming a second dielectric material on the first dielectric material, wherein the second dielectric material includes a first cantilever portion and a second cantilever portion, and forming a test material on the number of electrode portions, the first dielectric material, and the second dielectric material.
申请公布号 US2013283936(A1) 申请公布日期 2013.10.31
申请号 US201213458048 申请日期 2012.04.27
申请人 PELLIZZER FABIO;TORTORELLI INNOCENZO;PAPAGIANNI CHRISTINA;SPADINI GIANPAOLO;LEE JONG WON;MICRON TECHNOLOGY, INC. 发明人 PELLIZZER FABIO;TORTORELLI INNOCENZO;PAPAGIANNI CHRISTINA;SPADINI GIANPAOLO;LEE JONG WON
分类号 G01N33/00;B05D5/12;C23C16/455;H01B13/00 主分类号 G01N33/00
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