| 摘要 |
A method of actuating micromirror elements of a digital micromirror device is disclosed. A logic state is stored in the micromirror element including applying a negative voltage more negative than about -5 volts to the micromirror element, applying a positive voltage less than about 5 volts to a first electrode, and applying ground to a second electrode. A first logic state is switched to a second logic state with an inverted waveform, including applying ground to the first electrode, applying a positive voltage less than 5 volts to the second electrode, applying a negative BSA voltage to the first electrode, applying a positive reset voltage pulse greater than about 10 volts, removing the negative BSA voltage, and applying the negative voltage to the micromirror element.
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