发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 The present invention is directed to a semiconductor integrated circuit device that basically has a non-memory array area, a memory array area, and memory capacitors formed across lower embedded metal interconnection layers including a low-dielectric constant interlayer insulating film in the memory array area. In addition, a memory-periphery metal seal ring is provided in the lower embedded metal interconnection layers having at least the low-dielectric constant interlayer insulating film so as to surround the memory array area.
申请公布号 US2013285203(A1) 申请公布日期 2013.10.31
申请号 US201313852917 申请日期 2013.03.28
申请人 RENESAS ELECTRONICS CORPORATION 发明人 HIROI MASAYUKI;SAKOH TAKASHI
分类号 H01L21/02 主分类号 H01L21/02
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