发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a nonvolatile semiconductor memory device that hardly causes degradation and to provide a method of manufacturing the same.SOLUTION: A nonvolatile semiconductor memory device is a semiconductor memory device that includes a cell array layer having first wiring, a memory cell stacked on the first wiring, and second wiring formed on the memory cell so as to cross the first wiring. The memory cell has a current rectifying element and a variable resistance element. In a side wall of the current rectifying element, a portion having an atomic composition ratio of nitrogen higher than that of oxygen exists.
申请公布号 JP2013225668(A) 申请公布日期 2013.10.31
申请号 JP20130055147 申请日期 2013.03.18
申请人 TOSHIBA CORP 发明人 NISHIMURA JUN;YASUTAKE NOBUAKI;SAKAMOTO KEI;OKAMURA TAKAYUKI
分类号 H01L27/105;H01L45/00;H01L49/00 主分类号 H01L27/105
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