LINEAR ACTUATOR, VACUUM CONTROL DEVICE AND COMPUTER PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a linear actuator that can be used in a vacuum chamber where plasma is generated.SOLUTION: A linear actuator A includes: a piston cylinder 31 that faces the inside of a vacuum chamber 40 through an opening provided in the vacuum chamber 40, and is rectilinearly reciprocated; and a drive 70 for reciprocating the piston cylinder 31. An outer surface of the piston cylinder 31 is covered with a cylindrical member 32. The linear actuator A further includes a sliding part 60 provided at the opening and sealing between the inside of the vacuum chamber 40 and the outside of the vacuum chamber 40 while slidingly moving the cylindrical member 32. The cylindrical member 32 is configured to cover a sliding range including at least a second sliding range Lc of the piston cylinder 31. Furthermore, an outer surface of the cylindrical member 32 is configured to be smaller in gas adsorption amount per unit area than the outer surface of the piston cylinder 31.