| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter capable of appropriately extracting light in a set wavelength region, an optical filter device, an optical module and an electronic apparatus.SOLUTION: A wavelength variable interference filter 5 includes a first substrate 51, a second substrate 52 bonded to the first substrate 51 and constituting a first sealed space 57A between the second substrate and the first substrate 51, a first reflection film 551 disposed on a surface of the first substrate 51 opposing to the second substrate 52, a second reflection film 552 disposed on a surface of the second substrate 52 opposing to the first substrate 51 and opposing to the first reflection film 551 via a gap G1 between the reflection films, and an electrostatic actuator 56 that distorts the second substrate 52 in a direction separating from the first substrate to vary the gap G1 between reflection films. The gas pressure of the first sealed space 57A is lower than a gas pressure at least on one side of the second substrate 52 not opposing to the first substrate 51. |
