Arrangement for actuation of optical element in optical system, has actuator for exerting force on optical element, where actuator is arranged within vacuum-tight housing, and optical element is arranged outside the housing

摘要

The arrangement has an actuator (104) for exerting force on an optical element. The actuator is arranged within a vacuum-tight housing, and the optical element is arranged outside the housing. The actuator has a piezo element that is supplied with electric voltage. A drive of the optical element along a movement axis is realized by impinging the piezo element with a time-varying voltage profile. The optical element is driven by a rotor (103) that is arranged outside the vacuum-tight housing. An independent claim is included for a projection exposure system with a certain working wavelength.