| 摘要 |
PURPOSE: An evaporation apparatus is provided to continuously implement evaporation process and to realize a miniaturized evaporation apparatus with a new composition. CONSTITUTION: An evaporation apparatus comprises a crucible (110) including an inlet; a first heater (120) heating the crucible; a tank (130) supplying on object to be evaporated and including an outlet; and a second heater (140) heating the tank; and a transfer pipe (150) connecting the outlet of the tank and the inlet of the crucible. At this time, the first heater has a first temperature range, and the second heater has a second temperature range lower than the first temperature range. |
