发明名称 SEMICONDUCTOR DEVICES AND METHODS OF PREPARATION
摘要 An organic film-forming polymer has a Tg of at least 70°C and comprises a backbone comprising recurring units of Structure (A) shown in this application. These organic film-forming polymers can be used as dielectric materials in various devices with improved properties such as improved mobility.
申请公布号 WO2013162929(A1) 申请公布日期 2013.10.31
申请号 WO2013US36525 申请日期 2013.04.15
申请人 EASTMAN KODAK COMPANY 发明人 SHUKLA, DEEPAK;ROBELLO, DOUGLAS, ROBERT;MIS, MARK, R.;AHEARN, WENDY, G.;MEYER, DIANNE
分类号 H01L51/05 主分类号 H01L51/05
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