| 摘要 |
PROBLEM TO BE SOLVED: To provide a zinc oxide sintered body which is densified to such a degree that a transparent electrode having a small specific resistance can be obtained without generating abnormal discharge, when being used as a sputtering target.SOLUTION: A zinc oxide sintered body containing, in addition to ZnO, one or more kinds of additive elements selected from Al, Ga, In, Ti, Si, Ge and Sn, is formed, and has a plurality of deposits including the additive elements and a composite oxide phase of zinc, and a plurality of vacancies formed on the periphery of the deposits respectively, wherein the ratio of deposits having a circle equivalent diameter of ≥3 μm in the deposits is ≤20%, and the ratio of vacancies having a circle equivalent diameter of ≥3 μm in the vacancies is ≤50%. A production method thereof is not a method in which AlOpowder and ZnO powder are blended and molded to obtain a sintered body, but a method in which, first of all, calcined powder including a ZnAlOphase is produced, then the calcined powder and ZnO powder are blended, molded and fired, to thereby form a zinc oxide sintered body. |
