发明名称 COMPOSITION FOR PHOTOCURABLE NANOIMPRINT AND FORMATION METHOD OF PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a curable composition for nanoimprint excellent in chlorine gas-etching resistance, dispersibility and productivity; and a composition for photocurable nanoimprint allowing easy transcription of a pattern even when a metal-mold is pressed at a relatively low pressure.SOLUTION: A composition for photocurable nanoimprint contains (A) a hydrolysate mixture containing a hydrolysate of an organosilicon compound and a hydrolysate of an organosilicon compound having a (meta)acryl group, (B) a polymerizable monomer having a (meta)acryl group and (C) a photopolymerization initiator. In addition, the hydrolysate mixture (A) may contain a hydrolysate of a metal alkoxide.
申请公布号 JP2013225625(A) 申请公布日期 2013.10.31
申请号 JP20120097939 申请日期 2012.04.23
申请人 TOKUYAMA CORP 发明人 KANAGAWA KIYOTADA;UMEKAWA HIDEKI;KAWABATA YUICHIRO;SASAKI YUKO
分类号 H01L21/027;C08F2/44;C08G77/04 主分类号 H01L21/027
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