发明名称 QCM SENSOR APPARATUS AND CORROSIVE ENVIRONMENT EVALUATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a QCM sensor apparatus and a corrosive environment evaluation method capable of accurately evaluating the influence of corrosive gas in an environment in a relatively short time.SOLUTION: A QCM sensor apparatus includes: a first QCM sensor 11 including a first metal film 31a corroded by corrosive gas; a second QCM sensor 12 including a second metal film 31b hard to be corroded by the corrosive gas; a water supply device 14 for making moisture adhere to the surfaces of the first QCM sensor 11 and the second QCM sensor 12; and a control unit 20. The control unit 20 subtracts the resonance frequency of the second QCM sensor 12 from the resonance frequency of the first QCM sensor 11 and detects the corrosion amount of the first metal film 31a.
申请公布号 JP2013224871(A) 申请公布日期 2013.10.31
申请号 JP20120097333 申请日期 2012.04.23
申请人 FUJITSU LTD 发明人 ITO RYOJI
分类号 G01N5/02 主分类号 G01N5/02
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