发明名称 |
INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNPROCESSED SURFACE FEATURES |
摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer and method for measuring characteristics of optically unprocessed surface features.SOLUTION: Disclosed is an interferometry analysis method that includes: comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, where the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature on the basis of the comparison. |
申请公布号 |
JP2013224945(A) |
申请公布日期 |
2013.10.31 |
申请号 |
JP20130113240 |
申请日期 |
2013.05.29 |
申请人 |
ZYGO CORP |
发明人 |
DE GROOT PETER;MICHAEL J DARWIN;STONER ROBERT;GREGG M GALLATIN;DE LEGA XAVIER COLONNA |
分类号 |
G01B11/24;G01B9/02;G01B11/02;G01B11/06 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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