| 摘要 |
PROBLEM TO BE SOLVED: To optimize processing of substrates and also to avoid contamination, damage, fouling or oxidation as much as possible.SOLUTION: A device (1) for processing a plurality of substrates or substrate pairs comprises at least one pretreatment module (9) and at least one aftertreatment module (11). The pretreatment module and the aftertreatment module are coupled to a primary treatment module (10). The primary treatment module forms a pressure-tight lock to the neighboring pretreatment module and/or to the neighboring aftertreatment module. |
