| 摘要 |
PROBLEM TO BE SOLVED: To provide a decompression drier and a decompression dry method which shorten the dry time of a process liquid and obtain a uniform film thickness in the decompression drier which performs dry treatment of the process liquid to a processed substrate, to which the process liquid is applied, to form an application film.SOLUTION: A decompression drier comprises: chambers 85, 86 housing a processed substrate G and forming a processing space; a holding part 88 holding the processed substrate; an exhaust port 89 formed in the chamber; exhaust means 91 exhausting an atmosphere in the chamber from the exhaust port; an air inlet port 92 that is formed in an area located at the upstream side of airflow formed by the operation of the exhaust means and on the lateral side of the substrate; air supply means 97 supplying an inactive gas from the air inlet port into the processing space in the chambers; and rectification means 93 forming a passage of the airflow being flowed on an upper surface of the substrate in one direction by the exhaust operation of the exhaust means. The rectification means 93 is a rectification member filling a peripheral lower space of the processed substrate held by at least the holding part. |
