REFERENCE LINE GENERATION DEVICE AND CENTERING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a reference line generation device which is capable of easily detecting a center of a beam spot and of reducing the installation work time in comparison with conventional devices, and a centering device including the same.SOLUTION: The reference line generation device includes: a Laguerre Gaussian beam generation unit 101 which generates a collimated Laguerre Gaussian beam 12; a suspending unit 20 which suspends the Laguerre Gaussian beam generation unit in order to radiate the Laguerre Gaussian beam in a prescribed direction; a direction adjustment unit 30 which finely adjusts the radiation direction of the Laguerre Gaussian beam; and a damper unit 40 which suppresses oscillation of the Laguerre Gaussian beam unit.