| 发明名称 |
METHODS FOR PURIFYING HALOSILANE-CONTAINING STREAMS |
| 摘要 |
Methods for purifying a halosilane-containing process stream are disclosed. In some embodiments, arsenic and phosphorous impurities are removed from halosilane-containing process streams by use of distillation.
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| 申请公布号 |
US2013284585(A1) |
申请公布日期 |
2013.10.31 |
| 申请号 |
US201313836018 |
申请日期 |
2013.03.15 |
| 申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
GU ZHIHUI;PAZZAGLIA GIANLUCA;GUPTA PUNEET |
| 分类号 |
C01B33/107 |
主分类号 |
C01B33/107 |
| 代理机构 |
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