发明名称 |
METHODS AND APPARATUS FOR MARANGONI SUBSTRATE DRYING USING A VAPOR KNIFE MANIFOLD |
摘要 |
The present invention provides methods and apparatus for a Marangoni vapor knife assembly. The assembly includes a base having a channel extending longitudinally through the base and a plurality of passages extending laterally from the channel toward an outer face of the base; a top plate adapted to be removeably coupled to the base with an outer face flush with the outer face of the base; and a shim adapted to be disposed between the base and the top plate and further adapted to form a plurality of spray orifices in the assembly. Numerous additional features are disclosed. |
申请公布号 |
US2013283634(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
US201213458824 |
申请日期 |
2012.04.27 |
申请人 |
VELAZQUEZ EDWIN;D'AMBRA ALLEN L.;ATKINSON JIM K.;APPLIED MATERIALS, INC. |
发明人 |
VELAZQUEZ EDWIN;D'AMBRA ALLEN L.;ATKINSON JIM K. |
分类号 |
F26B21/00;F26B3/02 |
主分类号 |
F26B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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