FILM-FORMING METHOD AND FILM-FORMING DEVICE

摘要

A film-forming method of the present invention involves the following: supplying a first raw gas material composed of an acid anhydride and a second raw gas material composed of a diamine into an evacuated treatment vessel which holds a body to be treated; forming an insulating film composed of a polymer thin-film on the surface of the body to be treated; stopping the supply of the second raw gas material to the treatment vessel and continuing to supply the first raw gas material into the treatment vessel; and imparting a barrier function to the insulating film by reforming the insulating film. DRAWING: FIG. 4: S1 First step [Formation of polyimide film] (synchronous supply of PMDA and ODA) S2 Second step [Reforming treatment] (supply of PMDA) AA Film-forming method BB End