| 摘要 |
PROBLEM TO BE SOLVED: To adjust sensitivity of a magnetic field sensor comprising a magnetic field sensing element supported by a substrate.SOLUTION: The magnetic field sensing element 108 generates an output signal comprising a magnetic field-responsive signal portion. The magnetic field-responsive signal portion has sensitivity to a first magnetic field. The magnetic field sensor also comprises a feedback circuit 72. The feedback circuit comprises a first piezoresistor 80 supported by the substrate. The first piezoresistor has a node at which a first piezoelectric output signal is generated. The first piezoelectric output signal is responsive to a strain of the substrate in a first direction. The feedback circuit also comprises a second piezoresistor 86 supported by the substrate. Each of the first and second piezoresistors has a corresponding primary response axis, where the first and second piezoresistors are disposed in a relative orientation such that their primary response axes are generally perpendicular. The magnetic field sensor also comprises a gain-adjustment circuit 118 supported by the substrate and is configured to adjust the sensitivity of the magnetic field-responsive signal portion in response to a gain-adjustment signal 106. |
