发明名称 |
COMPENSATING CONCENTRATION UNCERTAINITY |
摘要 |
Methods and apparatus for depositing uniform boron-containing films are disclosed. A first precursor is delivered to a chamber through a first pathway having a first flow controller and a composition sensor. A second precursor is delivered by a second pathway, including a second flow controller, to a mixing point fluidly coupling the first and second pathways. A controller is coupled to the vibration sensor and the first and second flow controllers. The first precursor may be a mixture of diborane and a diluent gas, and the second precursor is typically a diluent gas. The flow rate of the first precursor may be set by determining a concentration of diborane in the first precursor from the composition sensor reading, and setting the flow rate to maintain a desired flow rate of diborane. The flow rate of the second precursor may be set to maintain a desired flow to the chamber.
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申请公布号 |
US2013284090(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
US201313864911 |
申请日期 |
2013.04.17 |
申请人 |
BALASUBRAMANIAN GANESH;SEAMONS MARTIN JAY;ALAYAVALLI KAUSHIK;LEE KWANGDUK DOUGLAS;YEH WENDY H.;RATHI SUDHA;VIJAYARAGHAVAN KRISHNA;CHAN CHIU |
发明人 |
BALASUBRAMANIAN GANESH;SEAMONS MARTIN JAY;ALAYAVALLI KAUSHIK;LEE KWANGDUK DOUGLAS;YEH WENDY H.;RATHI SUDHA;VIJAYARAGHAVAN KRISHNA;CHAN CHIU |
分类号 |
C23C16/455 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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