发明名称 MEASUREMENT WINDOW STRUCTURE OF POLISHING APPARATUS
摘要 PURPOSE: A window structure of a grinder for the measurement is provided to easily exchange a window plate and to improve the measurement accuracy. CONSTITUTION: A window structure of a grinder for the measurement comprises a surface plate (80), a measurement hole (81), a window member (11), a cylindrical form unit (12), a window plate (13), and a fixing unit (14). The window structure for the measurement is formed to attach the window member to the measurement hole. The measurement hole penetrates through two sides of the surface plate. The window member has the cylindrical form unit, the window plate, and the fixing unit. The fixing unit is fixed to the surface of the surface plate. The window member can control the angle to attach the fixing unit of the fixing unit and the position can be moved to the axial direction of the measurement hole.
申请公布号 KR20130119363(A) 申请公布日期 2013.10.31
申请号 KR20130044223 申请日期 2013.04.22
申请人 SPEEDFAM CO., LTD. 发明人 YOSHIHARA HIDEAKI;INOUE YUSUKE
分类号 B24B37/12;B24B37/34;B24B49/00 主分类号 B24B37/12
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