发明名称 MEASURING DEVICE AND MEASURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method that are capable of generating an omnidirectional intensity distribution of scattered light from a sample.SOLUTION: A measuring device 10 capable of measuring an intensity distribution of scattered light comprises: a light source 82 for emitting light to a sample 98; and a light receiver 88 for receiving scattered light from the sample 98. The device is provided with: a total reflection mirror for reflecting the light from the light source and emitting the light to the sample; and a half mirror 86 for partially reflecting the light from the light source, emitting the light to the sample and partially transmitting the scattered light. Furthermore, the device comprises an operation part that: generates an intensity distribution of the scattered light which is received by the light receiver outside an angle range where the total reflection mirror blocks the scattered light around an emission position set as a center, and an intensity distribution of transmitted light of the half mirror which is received by the light receiver in the angle range where the half mirror blocks the scattered light around the emission position set as the center; corrects the intensity distribution of the transmitted light on the basis of the intensity distribution of the scattered light; and generates data with the corrected intensity distribution of the transmitted light combined with the intensity distribution of the scattered light.
申请公布号 JP2013224825(A) 申请公布日期 2013.10.31
申请号 JP20120095940 申请日期 2012.04.19
申请人 NIKKA DENSOKU KK 发明人 TANAKA KAZUYUKI
分类号 G01N21/47;G01N21/57 主分类号 G01N21/47
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