METHODS AND APPARATUS FOR MARANGONI SUBSTRATE DRYING USING A VAPOR KNIFE MANIFOLD

摘要

The present invention provides methods and apparatus for a Marangoni vapor knife assembly. The assembly includes a base having a channel extending longitudinally through the base and a plurality of passages extending laterally from the channel toward an outer face of the base, a top plate adapted to be removeably coupled to the base with an outer face flush with the outer face of the base, and a shim adapted to be disposed between the base and the top plate and further adapted to form a plurality of spray orifices in the assembly. Numerous additional features are disclosed.