发明名称 CHARGED PARTICLE BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To provide users over wide fields with an observation image obtained by imparting an added value to an image obtained by bringing out, to the utmost, performance and function of a detection method using light under low vacuum as a detection signal source and by contriving the optimum constitution of a detection part.SOLUTION: A detector constitution is optimized by utilizing, to the utmost, a property of light having image information under low vacuum. The constitution of the present invention allows an image using the light by gas scintillation to be observed. Furthermore, the image can be provided to the users over the wide fields, freely from a vacuum mode, by the optimum constitution usable in combination with a high-vacuum detector.
申请公布号 JP2013225530(A) 申请公布日期 2013.10.31
申请号 JP20130164667 申请日期 2013.08.08
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 KATANE JUNICHI;ITO SUKEHIRO
分类号 H01J37/244 主分类号 H01J37/244
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