发明名称 DICING BLADE
摘要 Provided is a dicing blade with which cutting work can be performed stably and precisely in a ductile mode on a workpiece formed of a brittle material, without generating cracks or breaking. This dicing blade (26), which performs cutting work on a workpiece, is formed integrally in the shape of a disk by means of a diamond sintered body (80) formed by sintering diamond abrasive grains (82). The content of the diamond abrasive gains (82) in the diamond sintered body (80) is at least 80% by volume. Preferably, recessed parts formed in the surface of the diamond sintered body (80) are provided continuously in the circumferential direction at the outer circumferential part of the dicing blade (26).
申请公布号 WO2013161849(A1) 申请公布日期 2013.10.31
申请号 WO2013JP61998 申请日期 2013.04.24
申请人 TOKYO SEIMITSU CO., LTD.;SHIN-NIHON TECH INC.;WATANABE, JUNJI 发明人 WATANABE, JUNJI;FUJITA, TAKASHI;IZUMI, YASUO
分类号 H01L21/301;B24D3/00;B24D5/00;B24D5/12 主分类号 H01L21/301
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