发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
摘要 A micromechanical component, in particular a micromechanical sensor having a carrier substrate and having a cap substrate, and a manufacturing method are provided. The carrier substrate and the cap substrate are joined together with the aid of a eutectic bond connection or by a metallic solder connection or a glass solder connection (e.g., glass frit), in an edge area of the carrier substrate and the cap substrate. The connection of the carrier substrate and the cap substrate is established with the aid of connecting areas, and a stop trench or a stop protrusion or both a stop trench and a stop protrusion are situated within the edge areas in the bordering areas.
申请公布号 US2013285175(A1) 申请公布日期 2013.10.31
申请号 US201313869756 申请日期 2013.04.24
申请人 GONSKA JULIAN;FREY JENS;WEBER HERLBERT;SCHARY TIMO;MAYER THOMAS;ROBERT BOSCH GMBH 发明人 GONSKA JULIAN;FREY JENS;WEBER HERLBERT;SCHARY TIMO;MAYER THOMAS
分类号 B81B7/00;B81C1/00 主分类号 B81B7/00
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