发明名称 ANTI-SLIP SCRUBBER BRUSH, ASSEMBLY, AND ASSEMBLY METHODS
摘要 <p>In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush including exterior molded surfaces and a mounting passage having interior molded surfaces, the interior molded surfaces having molded foam, raised rotation-restraining features, and a mandrel including recesses directly coupled to the molded foam, raised rotation-restraining features of the scrubber brush to prevent slippage. Scrubber brushes and methods of assembly are provided, as are numerous other aspects.</p>
申请公布号 WO2013162863(A1) 申请公布日期 2013.10.31
申请号 WO2013US35681 申请日期 2013.04.08
申请人 APPLIED MATERIALS, INC 发明人 CHEN, HUI;CHEN, HUNG
分类号 H01L21/302;H01L21/02 主分类号 H01L21/302
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