| 摘要 |
PURPOSE: A load lock aligner chamber is provided to increase the space utilization of a clean room by performing an aligning process on a wafer. CONSTITUTION: A loading plate (120) is installed in a chamber body. A wafer is mounted on the upper part of the loading plate. An elastic member is installed in a pair of alignment guides (130). The elastic member elastically supports the edge part of the wafer. An actuator (140) arranges the wafer on the loading plate. |
