发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING CURED FILM, CURED FILM, ORGANIC EL DISPLAY DEVICE, AND LIQUID-CRYSTAL DISPLAY DEVICE |
摘要 |
<p>Provided is a photosensitive resin composition having high sensitivity, high transparency, high chemical resistance, high adhesion with a curing-film substrate, and exceptional dry-etching resistance, and enabling a low-permittivity curing film to be obtained. A photosensitive resin composition containing: (A) a polymer component including a polymer fulfilling at least one of (1) and (2): (1) a polymer having (a1) a structural unit in which an acid group has a residue protected by an acidolytic group, and (a2) a structural unit having a cross-linking group; (2) (a1) a polymer having a structural unit in which an acid group has a residue protected by an acidolytic group, and (a2) a polymer having a structural unit having a cross-linking group; (B) a photo-acid-generating agent; (C) an adduct-type block polyisocyanate compound; and (D) a solvent.</p> |
申请公布号 |
WO2013161861(A1) |
申请公布日期 |
2013.10.31 |
申请号 |
WO2013JP62026 |
申请日期 |
2013.04.24 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
SHIMOYAMA TATSUYA;YAMAZAKI KENTA;HIKITA MASANORI |
分类号 |
G03F7/004;C08G18/62;C08G18/80;G03F7/039;G03F7/40;H01L21/027;H01L51/50;H05B33/22 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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