发明名称 PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING CURED FILM, CURED FILM, ORGANIC EL DISPLAY DEVICE, AND LIQUID-CRYSTAL DISPLAY DEVICE
摘要 <p>Provided is a photosensitive resin composition having high sensitivity, high transparency, high chemical resistance, high adhesion with a curing-film substrate, and exceptional dry-etching resistance, and enabling a low-permittivity curing film to be obtained. A photosensitive resin composition containing: (A) a polymer component including a polymer fulfilling at least one of (1) and (2): (1) a polymer having (a1) a structural unit in which an acid group has a residue protected by an acidolytic group, and (a2) a structural unit having a cross-linking group; (2) (a1) a polymer having a structural unit in which an acid group has a residue protected by an acidolytic group, and (a2) a polymer having a structural unit having a cross-linking group; (B) a photo-acid-generating agent; (C) an adduct-type block polyisocyanate compound; and (D) a solvent.</p>
申请公布号 WO2013161861(A1) 申请公布日期 2013.10.31
申请号 WO2013JP62026 申请日期 2013.04.24
申请人 FUJIFILM CORPORATION 发明人 SHIMOYAMA TATSUYA;YAMAZAKI KENTA;HIKITA MASANORI
分类号 G03F7/004;C08G18/62;C08G18/80;G03F7/039;G03F7/40;H01L21/027;H01L51/50;H05B33/22 主分类号 G03F7/004
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