发明名称 DEVICE AND METHOD FOR METALIZING WAFERS
摘要 A device for metalizing wafers, in particular microchip wafers, in an electrolyte, contains a plurality of holder arrangements. Each holder arrangement has a chamber for the electrolyte which is separate from the electrolyte-receiving chambers in other holder devices, a ring acting as cathode, and an anode system as the anode being associated with each wafer.
申请公布号 US2013284602(A1) 申请公布日期 2013.10.31
申请号 US201113995051 申请日期 2011.12.12
申请人 HACKSTEINER MARKUS 发明人 HACKSTEINER MARKUS
分类号 C25D17/06 主分类号 C25D17/06
代理机构 代理人
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