发明名称 ELECTRONIC DEVICE
摘要 According to one embodiment, an electronic device includes a drive circuit on a semiconductor substrate, an insulating region including a first insulating part provided on the semiconductor substrate and formed of interlayer insulating films, and a second insulating part provided on the first insulating part, an element for a high-frequency provided on the insulating region and driven by the drive circuit, an interconnect including a first conductive part in the first insulating part, and a second conductive part in the second insulating part, and transmitting a drive signal from the drive circuit to the element, a first shield provided inside the insulating region and below the element, and a second shield provided inside the insulating region and below the second conductive part.
申请公布号 US2013285122(A1) 申请公布日期 2013.10.31
申请号 US201313830451 申请日期 2013.03.14
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMAZAKI HIROAKI
分类号 B81B3/00 主分类号 B81B3/00
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